说明：
Cheng's ambipolar layer theory indicates that the ambipolar layer thickness of the compound materials is of the same order of magnitude as manometer. ...展开
It is necessary to control film deposition speed to obtain even continuous thinner MN films. Thus, the influence of deposition parameters was studied. The results show that a reasonable condition depositing MN films and the influence law of deposition parameters were obtained. For our devices when this condition is at sputtering pressure of 1 Pa, N_2 concentration of 20%,and sputtering power of 80 W, the deposition parameters of MN films growing evenly and slowly can be accurately controlled. The conclusions show that deposition speed increase with sputtering power increasing. For the influence of sputtering pressure, there is an optimal value(0.5Pa), at which the deposition speed reaches maximum. The orientation of crystal grain in MN films is (100)and (110) by structural analysis. 收起
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